The study of the good polishing method for polymer SU-8 waveguide

Mohammad Syuhaimi, Ab-Rahman and Fazlinda, Ab-Aziz and Noor Azie Azura, Mohd Arif and Saiful Dzulkefly, Zan and Seri Mastura, Mustaza and Abang Anuar, Ehsan and Sahbudin, Shaari (2009) The study of the good polishing method for polymer SU-8 waveguide. Optica Applicata, 39 (3). pp. 459-465.

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Abstract

This research focused on polish characteristic of polymer based waveguides. The aim of the research was to show how polishing parameters affect the cut length of the end surface of SU-8 polymer on silicon and to detemine the best parameters for polishing SU-8 polymer. Then, four samples were used for characterizing the polishing of polymer. Each sample was polished with the same rotation and sandpaper size but with different rotational speed. The experiment result shows that the best rotational speed for polishing polymer SU-8 sample on silicon is 200 rpm.

Item Type: E-Article
Additional Information: Universiti Malaysia Sarawak, UNIMAS
Uncontrolled Keywords: waveguides polishing, SU-8 polymer, rotational speed, sandpaper, silicon, cut off length, Engineering, IPTA, Malaysia, Universiti Kebangsaan Malaysia, unimas, university, universiti, Sarawak, Kuching, Samarahan, education, undergraduate, postgraduate, research
Subjects: T Technology > T Technology (General)
T Technology > TA Engineering (General). Civil engineering (General)
T Technology > TP Chemical technology
Divisions: Academic Faculties, Institutes and Centres > Centre for Pre-University Studies
Depositing User: Karen Kornalius
Date Deposited: 03 Mar 2014 01:55
Last Modified: 14 Sep 2015 07:57
URI: http://ir.unimas.my/id/eprint/738

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