Mohammad Syuhaimi, Ab-Rahman and Fazlinda, Ab-Aziz and Noor Azie Azura, Mohd Arif and Saiful Dzulkefly, Zan and Seri Mastura, Mustaza and Abang Annuar, Ehsan and Sahbudin, Shaari (2009) The study of the good polishing method for polymer SU-8 waveguide. Optica Applicata, 39 (3). pp. 459-465.
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Abstract
This research focused on polish characteristic of polymer based waveguides. The aim of the research was to show how polishing parameters affect the cut length of the end surface of SU-8 polymer on silicon and to detemine the best parameters for polishing SU-8 polymer. Then, four samples were used for characterizing the polishing of polymer. Each sample was polished with the same rotation and sandpaper size but with different rotational speed. The experiment result shows that the best rotational speed for polishing polymer SU-8 sample on silicon is 200 rpm.
| Item Type: | Article |
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| Additional Information: | Universiti Malaysia Sarawak, UNIMAS |
| Uncontrolled Keywords: | waveguides polishing, SU-8 polymer, rotational speed, sandpaper, silicon, cut off length, Engineering, IPTA, Malaysia, Universiti Kebangsaan Malaysia, unimas, university, universiti, Sarawak, Kuching, Samarahan, education, undergraduate, postgraduate, research |
| Subjects: | T Technology > T Technology (General) T Technology > TA Engineering (General). Civil engineering (General) T Technology > TP Chemical technology |
| Divisions: | Academic Faculties, Institutes and Centres > Centre for Pre-University Studies Faculties, Institutes, Centres > Centre for Pre-University Studies Academic Faculties, Institutes and Centres > Centre for Pre-University Studies |
| Depositing User: | Karen Kornalius |
| Date Deposited: | 03 Mar 2014 01:55 |
| Last Modified: | 03 Aug 2023 01:47 |
| URI: | http://ir.unimas.my/id/eprint/738 |
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