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Siti Kudnie, Sahari and Nik Amni Fathi, Nik Zaini Fathi and Norsuzailina, Mohammad Sutan and Rohana, Sapawi (2015) Wet chemical cleaning effect on the formation of ultrathin interfacial layer between Germanium (Ge) and high-k dielectric. RSM 2015 - 2015 IEEE Regional Symposium on Micro and Nano Electronics, Proceedings. ISSN ISBN: 978-147998550-0