Activation energy of thermal oxidation germanium oxide on germanium substrates

Halim, N.A.A. and Sahari, S.K. and Hamzah, A.A. and Majlis, B.Y. and Marini, Sawawi and Hasanah, L. and Kashif, M. (2018) Activation energy of thermal oxidation germanium oxide on germanium substrates. 2018 IEEE International Conference on Semiconductor Electronics (ICSE), 2018. ISSN ISBN: 978-1-5386-5283-1

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Official URL: https://ieeexplore.ieee.org/document/8481204
Item Type: E-Article
Uncontrolled Keywords: activation energy, Ge oxidation, GeO2, GeO desorption, unimas, university, universiti, Borneo, Malaysia, Sarawak, Kuching, Samarahan, ipta, education, research, Universiti Malaysia Sarawak
Subjects: T Technology > TK Electrical engineering. Electronics Nuclear engineering
Divisions: Academic Faculties, Institutes and Centres > Faculty of Engineering
Depositing User: Karen Kornalius
Date Deposited: 01 Aug 2019 01:55
Last Modified: 01 Aug 2019 01:55
URI: http://ir.unimas.my/id/eprint/26229

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