A Numerical Approach to the Efficient Analysis of2D RF-MEMS Capacitor with Accelerated Motion

Shafrida, Sahrani and Mohd Shahril, Osman and Michiko, Kuroda (2009) A Numerical Approach to the Efficient Analysis of2D RF-MEMS Capacitor with Accelerated Motion. IEEE Antennas and Propagation Society International Symposium, 2009. APSURSI '09. ISSN 1522-3965

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Official URL: http://ieeexplore.ieee.org/document/5172148/

Abstract

The advancement in new numerical technique is the key to success of newer generation RF MEMS devices. In this paper, a novel time-domain modeling technique that has the capability to accurately simulate the transient effect of RF MEMS variable capacitors with accelerated motion controlled by the coupling of the electrostatic and mechanical forces is presented. The relation between the sinusoidal modulations of the frequency with the acceleration is shown. Its validity has been demonstrated in comparison between the computational results of the displacement with the theoretical results. Both results are in very good agreement. The next work will be considered to include the damping coefficient. Due to its numerical efficiency, the proposed technique can be a useful technique, which makes it suitable for the numerical analysis of the moving boundary problem in the near future

Item Type: E-Article
Uncontrolled Keywords: Radiofrequency microelectromechanical systems, Capacitors, Acceleration, Motion analysis, Time domain analysis, Computational modeling, Mechanical variables control, Force control, Motion control, Electric variables control, unimas, university, universiti, Borneo, Malaysia, Sarawak, Kuching, Samarahan, ipta, education, research, Universiti Malaysia Sarawak
Subjects: T Technology > TK Electrical engineering. Electronics Nuclear engineering
Divisions: Academic Faculties, Institutes and Centres > Faculty of Engineering
Depositing User: Karen Kornalius
Date Deposited: 12 Jun 2017 07:45
Last Modified: 12 Jun 2017 07:45
URI: http://ir.unimas.my/id/eprint/16558

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